Web安徽省合肥市经开区空港经济示范区硕放路1号 WebIn this paper we summarize our investigations into processing capability on the CLEAN TRACK TM LITHIUS Pro TM -i & TWINSCAN TM NXT:1950i litho cluster. Process performance with regards to critical dimension (CD) uniformity and defectivity are investigated to confirm adherence to ITRS 1 roadmaps specifications.
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WebCLEAN TRACK™ LITHIUS Pro™ AP for 300mm wafer processing system incorporates fundamental concepts from the widely-installed CLEAN TRACK™ ACT™ 12, with … Surface preparation system CELLESTA™ series for 300mm single wafer clean … ANTARES™ is a series of a fully automated, single-wafer, CryoKinetic … Synapse™ series became an industry standard Bonding/DeBonding tools for … The UNITY™ achieves excellent cost performance for plasma etch process … The EXIM™ series expands TEL’s product portfolio with an innovative 300mm PVD … NT333™ is TEL’s first semi-batch chamber for ALD (Atomic Layer Deposition). It … The Triase+™ series offers extra value as the latest single wafer deposition … Cellcia™ series is the next generation wafer probing system for 300mm wafers. … Webtested at the imec EUV cluster comprised of TEL CleanTrack LITHIUS Pro-Z and ASML NXE:3400B. The start-up performance, assessed by measuring defects down to 19nm size as a function of the flushing solvent volume, has shown the fast achievement of attaining a stable baseline. Lithography experiments targeting reduction of wafer defectivity, on- inyan productions
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WebCLEAN TRACK™ LITHIUS Pro™ Z is TEL's most advanced 300mm coater/developer for the 10nm technology node and beyond. It incorporates user-friendly operation, flexible configurations for future processes, and automated monitoring technology to support a wide range of applications from next generation development to high volume mass production. Web13 mrt. 2009 · Through collaborative efforts ASML and TEL are continuously improving the process performance for the LITHIUS Pro -i/ TWINSCAN XT:1900Gi litho cluster. In previous work from this collaboration, TEL and ASML have investigated the CDU and defectivity performance for the 45nm node with high through put processing. CDU … Web15 apr. 2011 · In this paper we summarize our investigations into processing capability on the CLEAN TRACK TM LITHIUS Pro TM-i & TWINSCAN TM NXT:1950i litho cluster. … inyang ethnicity